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                Products

                Automatic wafer engraving machine

                TRFP8210 is a machine for wafer ID engraving and automatic rewinding and sorting machines; it can read the Wafer ID from the back of the wafer, and then engrave the WaferID onto the front of the wafer by laser engraving. At the same time, it can realize the function of wafer transfer from one WAFER CASSETTE to another WAFER CASSETTE. Use X, Y, Z, T four-axis robotic arm, FouP, round wafer transport box, Wafer ID OCR, Notch recognition, laser engraving to achieve high-precision wafer ID engraving, positioning and product transfer between different cassettes . The equipment can be used for 12-inch 8-inch wafers and various standard material boxes, and non-standard material boxes can also be customized. The equipment is controlled by an industrial computer and a 15-inch touch operation man-machine interface, which is easy and convenient to operate

                • Overview
                • Technical Data

                Project

                Specification

                Remarks

                Specifications

                Wafer size

                8¡±&12¡¯¡¯ standard


                Lettering method

                Laser lettering


                Support material box

                Foup and round wafer transport magazine

                Non-standard box can be customized

                Wafer turning device

                Turning the wafer in the round wafer transport box and transferring the electrostatic paper


                Manipulator repeatability

                Within ¡À0.1mm


                Average operating speed

                UPH¡İ80


                Mapping function

                Check whether the silicon wafers are stacked, oblique, and relative arpage in the material box


                Wafer warpage compatibility

                Compatible with warpage ¡Ü1000um


                Wafer thickness compatibility

                Compatible wafer thickness range: 100-1500um


                Dimensions

                1100mm(W)*1450mm(L)*1700mm(H)


                Power

                power source

                single-phase 220V 50/60HZ


                Power

                3KW


                Compressed air

                0.5-0.7Mpa


                Weight

                500Kg